6264

Marumae Co., Ltd. designs, manufactures, and processes precision machinery and mechanical parts. The company offers flat panel display manufacturing equipment and semiconductor components. Its products include vacuum chambers, shower heads, exhaust plates, electrostatic chucks, heaters, upper electrodes, and targets, as well as parts for transfer systems and other vacuum components used in etching, CVD, coater/developers, sputtering, single wafer cleaning, ashing, wafer bonding, ion implantation, and annealing.